The origin of the inhomogeneity of electrical resistivity in magnetron-sputtered indium tin oxide thin films
- 作者Katsutaro Ichihara; Naoyuki Inoue; Michiko Okubo; Nobuaki Yasuda
- 卷第245卷
- 印刷ISSN0040-6090
- 文件大小474.57KB
- 发表时间1994
- DOI10.1016/0040-6090(94)90891-5
- 页码152-156