[IEEE 1994 IEEE International Integrated Reliability Workshop (IRWS) - Lake Tahoe, CA, USA (16-19 Oct. 1994)] Proceedings of 1994 IEEE International Integrated Reliability Workshop (IRWS) - An electrical method for determining the thickness of metal films and the cross-sectional area of metal lines
- 作者Schafft, H.A.; Mayo, S.; Jones, S.N.; Suehle, J.S.
- 文件大小952.90KB
- 发表时间1994
- DOI10.1109/irws.1994.515820
- 页码5-11
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