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Fundamental electrical properties of fluorinated and N2O plasma-annealed ultrathin silicon oxides grown by microwave plasma afterglow oxidation at low temperatures

Fundamental electrical properties of fluorinated and N2O plasma-annealed ultrathin silicon oxides grown by microwave plasma afterglow oxidation at low temperatures

Chen, P. C.; Hsu, Klaus Y. J.; Hwang, H. L.; Lin, J. Y.
  • 期刊名称Journal of Applied Physics
  • 作者Chen, P. C.; Hsu, Klaus Y. J.; Hwang, H. L.; Lin, J. Y.
  • 卷第76卷
  • 期第9期
  • 印刷ISSN0021-8979
  • 文件大小850.82KB
  • 发表时间1994
  • DOI10.1063/1.357170
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