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In situ measurement of thin-film conductivity during and after energetic condensation

In situ measurement of thin-film conductivity during and after energetic condensation

Mausbach, Michael

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Mausbach, Michael
卷第12卷
期第4期
印刷ISSN0734-2101
文件大小938.93KB
发表时间1994-7
DOI10.1116/1.579338

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