SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Charge-buildup damage to gate oxide
Gabriel, Calvin; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.
- 作者Gabriel, Calvin; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.
- 卷第2091卷
- 印刷ISSN0277-786X
- 文件大小218.98KB
- 发表时间1994
- DOI10.1117/12.167344
- 页码239-247