SPIE Proceedings [SPIE Europto High Power Lasers and Laser Applications V - Vienna, Austria (Sunday 3 April 1994)] High-Power Gas and Solid State Lasers - Advanced laser driver for soft x-ray projection lithography
- 作者Zapata, Luis E.; Beach, Raymond J.; Dane, C. Brent; Reichert, Patrick; Honig, John N.; Hackel, Lloyd A.; Bohrer, Markus; Letardi, Tommaso; Schuoecker, Dieter; Weber, Horst
- 卷第2206卷
- 印刷ISSN0277-786X
- 文件大小1103.05KB
- 发表时间1994
- DOI10.1117/12.184615
- 页码499-507
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