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SPIE Proceedings [SPIE Europto High Power Lasers and Laser Applications V - Vienna, Austria (Sunday 3 April 1994)] Laser Materials Processing: Industrial and Microelectronics Applications - <title>Machining of diffractive optics: a novel application for excimer laser?</title>

SPIE Proceedings [SPIE Europto High Power Lasers and Laser Applications V - Vienna, Austria (Sunday 3 April 1994)] Laser Materials Processing: Industrial and Microelectronics Applications - Machining of diffractive optics: a novel application for excimer laser?

Stauter, C.; Engel, Thierry; Fontaine, Joel; Biernaux, Alain P.; Beyer, Eckhard; Cantello, Maichi; La Rocca, Aldo V.; Laude, Lucien D.; Olsen, Flemming O.; Sepold, Gerd
  • 作者Stauter, C.; Engel, Thierry; Fontaine, Joel; Biernaux, Alain P.; Beyer, Eckhard; Cantello, Maichi; La Rocca, Aldo V.; Laude, Lucien D.; Olsen, Flemming O.; Sepold, Gerd
  • 卷第2207卷
  • 印刷ISSN0277-786X
  • 文件大小610.15KB
  • 发表时间1994
  • DOI10.1117/12.184776
  • 页码666-675
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