SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Emissivity compensated radiance-contrast-tracking pyrometry for semiconductor processing

Adel, Michael E.; Mangan, Shmuel; Ish-Shalom, Yaron; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.

作者Adel, Michael E.; Mangan, Shmuel; Ish-Shalom, Yaron; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K.
卷第2091卷
印刷ISSN0277-786X
文件大小367.27KB
发表时间1994
DOI10.1117/12.167353
页码311-322

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