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SPIE Proceedings [SPIE 1994 International Symposium on Optical Interference Coatings - Grenoble, France (Sunday 5 June 1994)] Optical Interference Coatings - <title>Deposition and characterization of a-SiC:H thin films</title>

SPIE Proceedings [SPIE 1994 International Symposium on Optical Interference Coatings - Grenoble, France (Sunday 5 June 1994)] Optical Interference Coatings - Deposition and characterization of a-SiC:H thin films

Demichelis, Francesca; Pirri, C. F.; Tresso, E.; Valente, F.; Bolzan, E.; Rigato, Valentino; Abeles, Florin
  • 作者Demichelis, Francesca; Pirri, C. F.; Tresso, E.; Valente, F.; Bolzan, E.; Rigato, Valentino; Abeles, Florin
  • 卷第2253卷
  • 印刷ISSN0277-786X
  • 文件大小386.21KB
  • 发表时间1994
  • DOI10.1117/12.192131
  • 页码539-550
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