Effects of thermal annealing on the properties of niobium nitride thin films
- 作者I. Hotovy; R. Srnanek; D. Buc
- 卷第13卷
- 期第16期
- 印刷ISSN0261-8028
- 电子ISSN1573-4811
- 文件大小568.24KB
- 发表时间1994-08-15
- DOI10.1007/bf00241020
- 页码1226-1228
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