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Effect of processing temperature during spin-on application on the properties of sol-gel silica films

Effect of processing temperature during spin-on application on the properties of sol-gel silica films

K. A. Vorotilov; V. I. Petrovsky; V. A. Vasiljev

作者K. A. Vorotilov; V. I. Petrovsky; V. A. Vasiljev
卷第2卷
印刷ISSN0928-0707
电子ISSN1573-4846
文件大小275.65KB
发表时间1994
DOI10.1007/bf00486309
页码559-562

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