Autocatalytic Formation of Silanols in Chemical Vapor Deposition of Silica from Tetraethoxysilane.
NAKAJIMA, Tsuyoshi; MATSUOKA, Masaaki; MISHIMA, Shozi; MATSUZAKI, Isao
- 期刊名称NIPPON KAGAKU KAISHI
- 作者NAKAJIMA, Tsuyoshi; MATSUOKA, Masaaki; MISHIMA, Shozi; MATSUZAKI, Isao
- 期第12期
- 印刷ISSN0369-4577
- 电子ISSN2185-0925
- 文件大小692.61KB
- 发表时间1994
- DOI10.1246/nikkashi.1994.1134
- 页码1134-1136