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Inversion of dose rate effects in ion implanted gallium arsenide in the low dose regime

Inversion of dose rate effects in ion implanted gallium arsenide in the low dose regime

C. Jasper; R. Morton; S.S. Lau; T.E. Haynes; R. Garcia; J.W. Mayer
  • 作者C. Jasper; R. Morton; S.S. Lau; T.E. Haynes; R. Garcia; J.W. Mayer
  • 卷第96卷
  • 印刷ISSN0168-583X
  • 文件大小414.24KB
  • 发表时间1995
  • DOI10.1016/0168-583x(94)00503-6
  • 页码294-297
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