Germanium implantation into amorphous silicon films
- 作者Alexey V. Ershov; Alexander A. Ezhevskii; Alexander F. Khokhlov; Dmitri A. Khokhlov; Alexander I. Mashin; Nikolay I. Mashin
- 卷第106卷
- 印刷ISSN0168-583X
- 文件大小431.37KB
- 发表时间1995
- DOI10.1016/0168-583x(96)80022-x
- 页码257-261
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