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Hetero-emitter-like characteristics of phosphorus doped polysilicon emitter transistors. Part II: band deformation due to residual stress in the polysilicon emitter

Hetero-emitter-like characteristics of phosphorus doped polysilicon emitter transistors. Part II: band deformation due to residual stress in the polysilicon emitter

Kondo, M.; Kobayashi, T.; Tamaki, Y.
  • 作者Kondo, M.; Kobayashi, T.; Tamaki, Y.
  • 卷第42卷
  • 期第3期
  • 印刷ISSN0018-9383
  • 电子ISSN1557-9646
  • 文件大小953.39KB
  • 发表时间1995
  • DOI10.1109/16.368040
  • 页码427-435
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