Interferometric fabrication of modulated submicrometer gratings in photoresist
- 期刊名称ao/34/14/ao-34-14-2540.pdf
- 作者Ehbets, Peter; Herzig, Hans Peter; Nussbaum, Philippe; Blattner, Peter; ndliker, René Dä
- 卷第34卷
- 期第14期
- 印刷ISSN0003-6935
- 电子ISSN1539-4522
- 文件大小848.28KB
- 发表时间1995
- DOI10.1364/AO.34.002540