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Effects of plasma treatment on the properties of room-temperature liquid-phase deposited (LPD) oxide films

Effects of plasma treatment on the properties of room-temperature liquid-phase deposited (LPD) oxide films

Ching-Fa Yeh; Shyue-Shyh Lin
  • 作者Ching-Fa Yeh; Shyue-Shyh Lin
  • 卷第187卷
  • 印刷ISSN0022-3093
  • 文件大小292.59KB
  • 发表时间1995
  • DOI10.1016/0022-3093(95)00116-6
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