Integrated ferroelectric microelectromechanical systems (MEMS)
- 期刊名称Integrated Ferroelectrics
- 作者Polla, D. L.; Schiller, P. J.
- 卷第7卷
- 印刷ISSN1058-4587
- 电子ISSN1607-8489
- 文件大小1242.60KB
- 发表时间1995-02
- DOI10.1080/10584589508220246
- 页码359-370
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