Electrical instability of ultrathin thermal oxides on silicon
- 作者P. Lundgren; M.O. Andersson; K.R. Farmer; O. Engström
- 卷第28卷
- 印刷ISSN0167-9317
- 文件大小303.60KB
- 发表时间1995
- DOI10.1016/0167-9317(95)00017-3
- 页码67-70
同作者推荐
Modelling of resolution enhancement processes in lithographyK.I. Arshak; D. McDonagh; A. Arshak; B.P. Mathur · 1997
Designing phase shift mask structures using SIMPHADB.P. Mathur; K.I. Arshak · 1994
Resist exposure optimization using figure of merit of resist profileN.N. Kundu; K.I. Arshak; B.P. Mathur; S.N. Gupta · 1989