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Characterization of lithium tantalate thin films sputter-deposited onto RuO2Si substrates

Characterization of lithium tantalate thin films sputter-deposited onto RuO2Si substrates

C.-H. Kohli; J. Moser; K. Prasad; P.E. Schmid; F. Lévy; G. Burri

作者C.-H. Kohli; J. Moser; K. Prasad; P.E. Schmid; F. Lévy; G. Burri
卷第29卷
印刷ISSN0167-9317
文件大小265.62KB
发表时间1995
DOI10.1016/0167-9317(95)00145-x
页码201-204

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