Morphology of Si(100) surfaces exposed to a remote H plasma
- 作者J. S. Montgomery; T. P. Schneider; R. J. Carter; J. P. Barnak; Y. L. Chen; J. R. Hauser; R. J. Nemanich
- 文件大小444.19KB
- 发表时间1995
- DOI10.1063/1.115100
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