Microfabrication of complex surface topographies using grey-tone lithography
- 作者B. Wagner; H.J. Quenzer; W. Henke; W. Hoppe; W. Pilz
- 卷第46卷
- 印刷ISSN0924-4247
- 文件大小1058.81KB
- 发表时间1995
- DOI10.1016/0924-4247(94)00868-i
- 页码89-94
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