Three-dimensional silicon electrostatic linear microactuator
- 作者N. Tirole; D. Hauden; P. Blind; M. Froelicher; L. Gaudriot
- 卷第48卷
- 期第2期
- 印刷ISSN0924-4247
- 文件大小485.74KB
- 发表时间1995
- DOI10.1016/0924-4247(95)00991-4
- 页码145-150
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