Studies of Corrosive Outgasses from Via Holes Using Thermal Desorption Spectroscopy
- 作者S. Tokitoh; H. Uchida; H. Uchida; Y. Okuno; K. Fushimi; G. Liu; Y. Sakaya; N. Hirashita
- 文件大小841.01KB
- 发表时间1995
- DOI10.1143/JJAP.34.1021
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