Excimer Laser Annealed Poly-Si TFT Technologies
- 期刊名称MRS Proceedings
- 作者Okumura, Fujio; Sera, Kenji; Tanabe, Hiroshi; Yuda, Katsuhisa; Okumura, Hiroshi
- 卷第377卷
- 电子ISSN1946-4274
- 文件大小698.76KB
- 发表时间1995-1
- DOI10.1557/proc-377-877
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