Modelling of an reactive magnetron discharge used for deposition of chromium oxide
Trennepohl, W; Bretagne, J; Gousset, G; Pagnon, D; Touzeau, M
- 期刊名称Plasma Sources Science and Technology
- 作者Trennepohl, W; Bretagne, J; Gousset, G; Pagnon, D; Touzeau, M
- 卷第5卷
- 期第4期
- 印刷ISSN0963-0252
- 电子ISSN1361-6595
- 文件大小367.33KB
- 发表时间1996-11-01
- DOI10.1088/0963-0252/5/4/002
- 页码607-621