Numerical Analysis of Particle Deposition onto Horizontal Freestanding Wafer Surfaces Heated or Cooled
Oh, Myung Do; Yoo, Kyung Hoon; Myong, Hyon Kook
- 期刊名称Aerosol Science and Technology
- 作者Oh, Myung Do; Yoo, Kyung Hoon; Myong, Hyon Kook
- 卷第25卷
- 期第2期
- 印刷ISSN0278-6826
- 电子ISSN1521-7388
- 文件大小904.74KB
- 发表时间1996-01
- DOI10.1080/02786829608965387
- 页码141-156