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Coupled FEM simulation for the characterization of the fluid flow within a micromachined cantilever valve

Coupled FEM simulation for the characterization of the fluid flow within a micromachined cantilever valve

Koch, M; Evans, A G R; Brunnschweiler, A
  • 期刊名称Journal of Micromechanics and Microengineering
  • 作者Koch, M; Evans, A G R; Brunnschweiler, A
  • 卷第6卷
  • 期第1期
  • 印刷ISSN0960-1317
  • 电子ISSN1361-6439
  • 文件大小158.82KB
  • 发表时间1996-03-01
  • DOI10.1088/0960-1317/6/1/027
  • 页码112-114
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