Humidity-dependent mechanical properties of polyimide films and their use for IC-compatible humidity sensors

• 作者Karsten Sager; Andreas Schroth; Arne Nakladal; Gerald Gerlach
• 卷第53卷
• 印刷ISSN0924-4247
• 文件大小474.78KB
• 发表时间1996
• DOI10.1016/0924-4247(96)01132-6
• 页码330-334