发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

The effect of microwave power on the deposition of boron-doped aSiC:H films using the electron cyclotron resonance method

The effect of microwave power on the deposition of boron-doped aSiC:H films using the electron cyclotron resonance method

S.F. Yoon; R. Ji; J. Ahn; W.I. Milne

作者S.F. Yoon; R. Ji; J. Ahn; W.I. Milne
卷第288卷
印刷ISSN0040-6090
文件大小260.50KB
发表时间1996
DOI10.1016/s0040-6090(96)08803-7
页码155-159

← 返回【学霸图书馆】主页