$SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Optical Inspection and Micromeasurements - <title>Equivalent wavelength interferometry using diffractive optics</title>$

SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Optical Inspection and Micromeasurements - Equivalent wavelength interferometry using diffractive optics

de Groot, Peter J.; Gorecki, Christophe

作者de Groot, Peter J.; Gorecki, Christophe
卷第2782卷
印刷ISSN0277-786X
文件大小723.87KB
发表时间1996
DOI10.1117/12.250773
页码446-454

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SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Optical Inspection and Micromeasurements - Equivalent wavelength interferometry using diffractive optics