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Self-consistent particle simulation of RF discharge in argon based on detailed collision data

Self-consistent particle simulation of RF discharge in argon based on detailed collision data

K Nanbu; Y Kitatani

作者K Nanbu; Y Kitatani
卷第47卷
印刷ISSN0042-207X
文件大小307.08KB
发表时间1996
DOI10.1016/0042-207x(96)00116-9
页码1023-1025

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