Investigation of implanted layers in silicon carbide by a modulation photoreflection method
H. G. Walther; H. Karge; K. L. Muratikov; A. V. Suvorov; I. O. Usov
- 作者H. G. Walther; H. Karge; K. L. Muratikov; A. V. Suvorov; I. O. Usov
- 卷第23卷
- 期第7期
- 印刷ISSN1063-7850
- 电子ISSN1090-6533
- 文件大小84.35KB
- 发表时间1997-07
- DOI10.1134/1.1261726
- 页码500-503