Properties of depth-profile controlled boron nitride films prepared by ion-beam assisted deposition
- 作者M. Kumagai; M. Suzuki; T. Suzuki; Y. Tanaka; Y. Setsuhara; S. Miyake; K. Ogata; M. Kohata; K. Higeta; T. Einishi; Y. Suzuki; Y. Shimoitani; Y. Motonami
- 印刷ISSN0168-583X
- 文件大小576.57KB
- 发表时间1997
- DOI10.1016/s0168-583x(97)00042-6
- 页码977-980
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