High field stressing effects on the split N2O grown thin gate dielectric by rapid thermal processing
Subrahmanyam, P.V.S.; Prabhakar, A.; Vasi, J.
- 作者Subrahmanyam, P.V.S.; Prabhakar, A.; Vasi, J.
- 卷第44卷
- 期第3期
- 印刷ISSN0018-9383
- 电子ISSN1557-9646
- 文件大小73.87KB
- 发表时间1997
- DOI10.1109/16.556163
- 页码505-508