Design for semiconductor manufacturing. Perspective
- 作者Preston White, K., Jr.; Trybula, W.J.; Athay, R.N.
- 卷第20卷
- 期第1期
- 印刷ISSN1083-4400
- 文件大小156.08KB
- 发表时间1997
- DOI10.1109/3476.585145
- 页码58-72
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