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Modulated sputtering process for smooth surface YBCO film deposition

Modulated sputtering process for smooth surface YBCO film deposition

C. Camerlingo; B. Ruggiero; M. Russo; E. Sarnelli; A. Del Vecchio; F. De Riccardis; L. Tapfer
  • 作者C. Camerlingo; B. Ruggiero; M. Russo; E. Sarnelli; A. Del Vecchio; F. De Riccardis; L. Tapfer
  • 卷第251卷
  • 印刷ISSN0925-8388
  • 文件大小564.29KB
  • 发表时间1997
  • DOI10.1016/s0925-8388(96)02766-1
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