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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A fully surface-micromachined piezoelectric accelerometer

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A fully surface-micromachined piezoelectric accelerometer

DeVoe, D.L.; Pisano, A.P.

作者DeVoe, D.L.; Pisano, A.P.
卷第2卷
文件大小506.24KB
发表时间1997
DOI10.1109/SENSOR.1997.635423
页码1205-1208

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