[IEEE Symposium on VLSI Technology - Kyoto, Japan (1997.06.12-1997.06.12)] Symposium on VLSI Technology - Modeling And Characterization Of N/sup +/- And P/sup +/-polysilicon-gated Ultra Thin Oxides (21-26 /spl Aring/)
Lo, ; Buchanan, ; Taur, ; Han, ; Wu,
- 作者Lo, ; Buchanan, ; Taur, ; Han, ; Wu,
- 文件大小231.61KB
- 发表时间1997
- DOI10.1109/VLSIT.1997.623742
- 页码149-150