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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A surface micromachined latching accelerometer

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A surface micromachined latching accelerometer

Xi-Qing Sun, ; Shifang Zhou, ; Carr, W.N.

作者Xi-Qing Sun, ; Shifang Zhou, ; Carr, W.N.
卷第2卷
文件大小377.76KB
发表时间1997
DOI10.1109/sensor.1997.635418
页码1189-1192

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