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[IEEE 1997 8th International Conference on Advanced Robotics. Proceedings. ICAR'97 - Monterey, CA, USA (7-9 July 1997)] 1997 8th International Conference on Advanced Robotics. Proceedings. ICAR'97 - Three-dimensional silicon micromechanical parts manufactured by electro-discharge machining

[IEEE 1997 8th International Conference on Advanced Robotics. Proceedings. ICAR'97 - Monterey, CA, USA (7-9 July 1997)] 1997 8th International Conference on Advanced Robotics. Proceedings. ICAR'97 - Three-dimensional silicon micromechanical parts manufactured by electro-discharge machining

Heeren, P.S.; Reynaerts, D.; Van Brussel, H.

作者Heeren, P.S.; Reynaerts, D.; Van Brussel, H.
文件大小919.09KB
发表时间1997
DOI10.1109/icar.1997.620190
页码247-252

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