[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Grand in purpose insignificant in size

• 作者Trimmer, W.
• 文件大小392.35KB
• 发表时间1997
• DOI10.1109/memsys.1997.581730
• 页码9-13