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Effects of Post-Annealing on the Conduction Properties of
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Capacitors for Dynamic Random Access Memory Applications

Effects of Post-Annealing on the Conduction Properties of P t /( B a , S r ) T i O ₃ / P t Capacitors for Dynamic Random Access Memory Applications

Joo, Jae-Hyun; Jeon, Yoo-Chan; Seon, Jeong-Min; Oh, Ki-Young; Roh, Jae-Sung; Kim, Jae-Jeong

期刊名称Japanese Journal of Applied Physics
作者Joo, Jae-Hyun; Jeon, Yoo-Chan; Seon, Jeong-Min; Oh, Ki-Young; Roh, Jae-Sung; Kim, Jae-Jeong
卷第36卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小727.97KB
发表时间1997-7-15
DOI10.1143/JJAP.36.4382
页码4382-4385

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