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[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Implant activation and redistribution of dopants in GaN

[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Implant activation and redistribution of dopants in GaN

Zolper, J.C.; Pearton, S.J.; Wilson, R.G.; Stall, R.A.
  • 作者Zolper, J.C.; Pearton, S.J.; Wilson, R.G.; Stall, R.A.
  • 文件大小365.71KB
  • 发表时间1997
  • DOI10.1109/iit.1996.586515
  • 页码705-708
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