[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Stress-optimised shape memory microvalves
Skrobanek, K.D.; Kohl, M.; Miyazaki, S.
- 作者Skrobanek, K.D.; Kohl, M.; Miyazaki, S.
- 文件大小680.61KB
- 发表时间1997
- DOI10.1109/memsys.1997.581818
- 页码256-261