Parametrization of the Laframboise theory for cylindrical Langmuir probe analysis
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Mausbach, Michael
- 卷第15卷
- 期第6期
- 印刷ISSN0734-2101
- 文件大小495.94KB
- 发表时间1997-11
- DOI10.1116/1.580886
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