[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - A piezoresistive accelerometer with a novel vertical beam structure
Hong Chen, ; Minhang Bao, ; Haijun Zhu, ; Shaoqun Shen,
- 作者Hong Chen, ; Minhang Bao, ; Haijun Zhu, ; Shaoqun Shen,
- 卷第2卷
- 文件大小420.56KB
- 发表时间1997
- DOI10.1109/sensor.1997.635421
- 页码1201-1204