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Inhomogeneous strain states in sputter deposited tungsten thin films

Inhomogeneous strain states in sputter deposited tungsten thin films

I. C. Noyan; T. M. Shaw; C. C. Goldsmith

作者I. C. Noyan; T. M. Shaw; C. C. Goldsmith
文件大小339.25KB
发表时间1997
DOI10.1063/1.366237

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