Radio Frequency Diagnostics for Plasma Etch Systems
- 期刊名称Journal of The Electrochemical Society
- 作者Bushman, Scott
- 卷第144卷
- 期第2期
- 印刷ISSN0013-4651
- 文件大小4301.53KB
- 发表时间1997
- DOI10.1149/1.1837475
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