Excimer laser deposition of c-axis oriented Pb(Zr, Ti)O3 thin films on silicon substrates with direct-current glow discharge
- 期刊名称Journal of Materials Research
- 作者Zheng, Lirong; Hu, Xuhong; Yang, Pingxiong; Xu, W-ping; Lin, Chenglu
- 卷第12卷
- 期第5期
- 印刷ISSN0884-2914
- 电子ISSN2044-5326
- 文件大小178.51KB
- 发表时间1997-5
- DOI10.1557/jmr.1997.0164
- 页码1179-1182
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